Microspectrometer with sacrificial layer integrated with integrated circuit on the same substrate
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United States of America Patent
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Nov 14, 2000
Issued Date -
N/A
app pub date -
Apr 25, 1994
filing date -
Jan 22, 1992
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention relates to microfabricated spectrometers including methods of making and using same. Microspectrometers can be formed in a single chip in which detectors and light sources can be monolithically integrated. The microspectrometer can be integrated into a sensor system to measure the optical and physical properties of solids and fluids.
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