Method and apparatus for singulating semiconductor devices

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United States of America Patent

PATENT NO 6150240
SERIAL NO

09122921

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Method and apparatus for singulating semiconductor devices (21) is provided. This approach eliminates the need for an adhesive tape. A fixture (10) is provided to hold the joined semiconductor devices. The fixture has grooves (14 and 18) to accommodate a saw blade (35). The saw makes a cut in two directions thereby separating or singulating the semiconductor devices. Bars (24) are placed across the semiconductor devices when sawing in the second direction to hold the semiconductor devices in the holding fixture. A pick and place machine can then be used to remove the singulated semiconductor devices from the holding fixture.

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Patent Owner(s)

  • FREESCALE SEMICONDUCTOR, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cho, Kilho Seoul, KR 1 23
Lee, Minju Kyunggi-do, KR 26 50

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