Distance detector for focus control in laser beam machine
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United States of America Patent
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-
Nov 21, 2000
Grant Date -
N/A
app pub date -
Dec 23, 1998
filing date -
Dec 26, 1997
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A distance detector detects a distance between a focal position and a workpiece by use of a capacitance. A sensing electrode forms the capacitance relative to said workpiece. An input signal generator generates an alternating signal or an input signal that is input into the sensing electrode. A signal detector detects an alternating signal or a detection signal that is generated at the sensing electrode and that has a value varied in accordance with the capacitance. A computing unit receives the input signal from the input signal generator and the detection signal from the signal detector. The computing unit extracts a component having the same frequency as a frequency of the input signal from the detection signal. Thus, it computes the extracted component to generate a distance information output representing the distance between the focal position and the workpiece.
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