Process gas supply unit
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Nov 28, 2000
Grant Date -
N/A
app pub date -
Jun 3, 1998
filing date -
Jun 6, 1997
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A process gas supply unit without conventional pipes. The process gas supply unit may include the components of a mass flow controller, an input valve, an output valve, a purge valve, a vacuum valve, a check valve, a regulator, and a filter. Module blocks are attached to at least one of the components with bolts from a predetermined direction. The module blocks are mounted on base plates with bolts from the same predetermined direction, and the base plates are mounted on a mounting panel with bolts from the same predetermined direction.
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