Wafer cassette rotation mechanism
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Nov 28, 2000
Grant Date -
N/A
app pub date -
Aug 26, 1997
filing date -
Aug 26, 1997
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The present invention concerns a device for the rotation of a wafer cassette such as between a horizontal orientation and a vertical orientation. The wafer cassette rotation device includes a carriage for receiving and supporting a wafer cassette, a receptacle in which the carriage is supported and rotates, and a drive mechanism for rotating the carriage together with any wafer cassette that has been inserted into the carriage, between horizontal and vertical orientations. The carriage is shaped to receive a standard wafer cassette, the carriage open at both front and top portions, includes wafer cassette supports. Wheels may be attached to opposing side edges of the bottom of the carriage. A cam drive mechanism is used to move the carriage within the receptacle.
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