Method of using a compliant process cassette
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Nov 28, 2000
Grant Date -
N/A
app pub date -
Jan 21, 1999
filing date -
Aug 29, 1996
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A cassette for supporting substantially planar objects such as photomasks, glass plates or semiconductor wafers during processing. The cassette is composed of bars connected at each end to an endpiece. Arms which form part of the endpiece are hinged to permit the side bars of the cassette to move inwardly and outwardly from one another when objects are inserted in the cassette. A bridge can connect an upper portion of the arms. The bridge can be used to lift the cassette and cause flexing of the cassette to ensure better retention while the cassette is being lifted.
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