Importance

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Abstract

A substrate processing unit having a substrate processing section for processing a substrate held therein while supplying a process fluid to the substrate; an enclosure enclosing the substrate processing section and having an opening, formed in a side wall thereof, through which the substrate is carried in and out of the substrate processing section; a process fluid pipe through which the process fluid is supplied to the substrate held in the processing section; and a connector section for connecting the process fluid pipe to an external process fluid source. The connector section is provided on a side wall of the enclosure opposite across the substrate processing section from the side wall formed with the opening. A substrate processing apparatus is constituted by a plurality of such substrate processing units which are arranged with the openings thereof being oriented in substantially the same direction.

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First Claim