Gray scale etching for thin flexible interposer
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United States of America Patent
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-
Dec 5, 2000
Grant Date -
N/A
app pub date -
Feb 11, 1998
filing date -
Nov 7, 1997
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Disclosed is a sculpted probe pad and a gray scale etching process for making arrays of such probe pads on a thin flexible interposer for testing the electrical integrity of microelectronic devices at terminal metallurgy. Also used in the etching process is a novel fixture for holding the substrate and a novel mask for 1-step photolithographic exposure. The result of the invention is an array of test probes of preselected uniform topography, which make ohmic contact at all points to be tested simultaneously and nondestructively.
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