Quartz crystal microbalance system for detecting concentration of a selected gas component in a multicomponent gas stream
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United States of America Patent
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Dec 5, 2000
Grant Date -
N/A
app pub date -
Jun 1, 1998
filing date -
Jun 1, 1998
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Abstract
A quartz microbalance detector system for controlling the concentration of a gas component in a gas stream. The quartz microbalance interacts with the gas component, to effect a change in the oscillation frequency of the quartz microbalance detector and produce a signal correlative of concentration of the gas component in the gas stream. A specific embodiment includes a device for sensing concentration of a halogen-containing gas species in a gas stream, comprising a quartz microbalance detector having a quartz crystal with a surface functionalized with --OH functionality that reversibly reacts with the gas component to yield a bound reaction product on the surface that effects a change in the oscillation frequency of the quartz microbalance detector. The quartz microbalance may be utilized to maintain a set-point concentration of a gas compound in a multicomponent stream.
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