Slurry circulation type surface polishing machine

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6159082
SERIAL NO

09257726

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The bottom of each collection groove for collecting a used abrasive slurry and a rinsing solution is formed like the letter V, an exhaust port is formed at the lowest position of the bottom of the groove, the collection pipe of a slurry supply unit and the collection pipe of a rinsing solution supply unit are connected to the exhaust port, and the collection pipe of the rinsing solution exhaust unit is connected to a suction pump for forcedly discharging the rinsing solution by suction.

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Patent Owner(s)

Patent OwnerAddress
SPEEDFAM CO LTDJAPAN'S KANAGAWA COUNTY LAI LAI CITY FOUR 2 37 AIKAWA-SHI KANAGAWA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Iida, Shinya 2647, Hayakawa, Ayase-shi, JP 29 549
Sugiyama, Misuo 2647, Hayakawa, Ayase-shi, JP 7 253
Wang, Xu Jin 2647, Hayakawa, Ayase-shi, JP 2 54

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