Blue vertical cavity surface emitting laser

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United States of America Patent

PATENT NO 6160833
SERIAL NO

09073707

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Abstract

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The present invention provides an independently addressable, vertical cavity surface emitting laser ('VCSEL') in the blue wavelength range of 390 to 430 nanometers. The gallium nitride-based laser structure is grown by selective area epitaxy and lateral mask overgrowth. By appropriate patterning of a dielectric mask on the gallium nitride layer on a sapphire substrate, areas in a second gallium nitride layer can have a low defect density upon which the remainder of the laser structure can be formed.

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Patent Owner(s)

Patent OwnerAddress
XEROX CORPORATION45 GLOVER AVENUE P O BOX 4505 NORWALK CT 06856-4505

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Floyd, Philip D Sunnyvale, CA 75 3115
Hofstetter, Daniel Sunnyvale, CA 5 342

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