US Patent No: 6,161,294
Number of patents in Portfolio can not be more than 2000
Overhead scanning profiler
Stats
-
Dec 19, 2000
Issued date -
Mar 23, 1998
filing date -
09/046,318
serial no -
Expired
status
Importance
Loading Importance Indicators...
Abstract
An apparatus and method for surface profile measurements of large samples. The sample is held by a stationary chuck, while a four-axis (X, Y, Z and theta axis) positioning assembly manipulates and positions an overhead scan assembly and measurement stylus to perform the profilometry. To observe the sample surface in the vicinity of the measurement stylus, an illumination and imaging capability is also provided. Backlash and error are reduced in the Z axis assembly through use of cams and cam followers, and in the scan assembly through use of multiple tensioned wires, with low-friction sliding elements. The apparatus reduces vibration and supports heavy (up to 400 kg) samples while allowing accurate profile measurements.
Loading the Abstract Image...
First Claim
Related Publications
Loading Related Publications...
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art
| Patent Info | (Count) | # Cites | Year |
|---|---|---|---|
|
|
|||
| 4,391,044 Metrology instrument for measuring vertical profiles of integrated circuits and the like | 16 | 1981 | |
| 4,755,746 Apparatus and methods for semiconductor wafer testing | 154 | 1985 | |
| 5,309,755 Profilometer stylus assembly insensitive to vibration | 19 | 1992 | |
|
|
|||
| 5,466,935 Programmable, scanned-probe microscope system and method | 11 | 1995 | |
|
|
|||
| 4,945,501 Method for determining position within the measuring volume of a coordinate measuring machine and the like and system therefor | 165 | 1989 | |
|
|
|||
| 5,003,254 Multi-axis universal circuit board test fixture | 39 | 1989 | |
|
|
|||
| 4,689,491 Semiconductor wafer scanning system | 53 | 1985 | |
|
|
|||
| 4,450,746 Flute chorus generator for a polyphonic tone synthesizer | 5 | 1982 | |
|
|
|||
| 4,778,313 Intelligent tool system | 28 | 1987 | |
|
|
|||
| 5,675,082 Goniometer loader for testing the height of a disk drive head gimbal assembly | 12 | 1995 | |
|
|
|||
| 5,731,708 Unpackaged semiconductor testing using an improved probe and precision X-Y table | 58 | 1995 | |
|
|
|||
| 4,306,464 Multi-directional mechanical positioning apparatus | 7 | 1977 | |
|
|
|||
| 5,453,616 Probe microscope having error correction piezoelectric scanner | 7 | 1994 | |
|
|
|||
| 5,339,531 Coordinate measuring machine | 7 | 1993 | |