Method for producing an electrostatic actuator and an inkjet head using it
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United States of America Patent
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Dec 26, 2000
Issued Date -
N/A
app pub date -
Aug 5, 1999
filing date -
Sep 21, 1990
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A manufacturing method for a device having an electrostatic actuator for example inkjet head, whereby warping of the diaphragms does not occur as a result of anodic bonding is provided. The method comprises the steps of etching a first substrate on the first surface thereof to form a concave portion and a diaphragm provided in bottom walls of the concave portion, forming an electrode on a second substrate, and anodically bonding the second substrate to a second surface of the first substrate, opposite the first surface, such that the electrode is aligned adjacent to the diaphragm with a gap therebetween. The bonding temperature of the anodically bonding step is set within a temperature range whereby the contraction of the first substrate after bonding is equal to or greater than the contraction of the second substrate.
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