Inductor with cobalt/nickel core for integrated circuit structure with high inductance and high Q-factor
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United States of America Patent
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Dec 26, 2000
Grant Date -
N/A
app pub date -
May 13, 1998
filing date -
May 13, 1998
priority date (Note) -
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Abstract
An integrated circuit structure is provided with an inductor formed therein which comprises a metal coil on an insulated surface over a semiconductor substrate, and a high magnetic susceptibility cobalt/nickel metal core located adjacent said metal coil, but spaced therefrom by one or more insulation layers. In one embodiment, the high magnetic susceptibility cobalt/nickel metal core is placed between lower and upper portions of the metal coil which are interconnected together by filled vias. In another embodiment, the metal coil is formed in a serpentine shape in one plane on an insulated surface over the semiconductor substrate, and the high magnetic susceptibility cobalt/nickel metal core is formed over the serpentine coil, but spaced from the serpentine coil by another insulation layer.
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