Substrate processing apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jan 2, 2001
Grant Date -
N/A
app pub date -
Nov 4, 1998
filing date -
Nov 5, 1997
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A substrate processing apparatus comprising a substrate mounting table, a cup having an upper opening and surrounding the substrate mounting table, a lid for opening/closing the upper opening of the cup, a support arm for supporting the lid, a first lifting mechanism having a first piston for supporting the support arm directly or indirectly and a first cylinder for guiding the first piston in an up-and-down motion, a second lifting mechanism having a second piston for supporting the support arm directly or indirectly and a second cylinder for guiding the second piston in up-and -down motion, a driving circuit for supplying the pressurized fluid to the first and second cylinders, independently and exhausting the pressurized fluid from the first and second cylinders, independently, and a control mechanism for controlling operations of the driving circuit.
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