Importance

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Abstract

A method for operating an electro-mechanical grating device comprises the steps of: providing a beam of light; applying a first electrostatic actuation force for a certain amount of time thereby generating a first pattern in each group wherein the pattern comprises N different levels thereby diffracting the incident light beam into a first direction; and applying a second electrostatic actuation force for a certain amount of time thereby generating a second pattern in each group wherein the second pattern comprises N different levels thereby diffracting the incident light beam into a second direction different from the first direction. The electro-mechanical grating device has a plurality of spaced apart deformable ribbon elements disposed parallel to each other in the unactuated state and spanning a channel. The deformable ribbon elements are organized in groups of N elements wherein N is greater than 2. A plurality of standoffs are provided, wherein according to the longitudinal direction of the electro-mechanical grating device at least N-2 standoffs are associated with each group.

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First Claim