Importance

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Abstract

In a dust precipitation device for filtration of dust created during crystal growth from a melt, cold surfaces are provided as contact surfaces as a part of the gas control geometry, to which the dust can adhere and thus become separated from the transport gas pumped from the processing chamber. Due to cooling of the flow contact surfaces, for example, by a coolant that is supplied via coolant lines blockable by valves, the dust is filtered very effectively from the transport gas. The extraction device has several precipitation chambers located one behind the other for the passage and filtering of the dust from the transport gas. The individual precipitation chambers are connected to each other so that they can be individually removed from or inserted into the precipitation device, for example, manually.

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First Claim