Method and apparatus for electro-chemical mechanical deposition
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United States of America Patent
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Jan 23, 2001
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N/A
app pub date -
Dec 1, 1998
filing date -
Nov 3, 1998
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Abstract
The present invention deposits a conductive material from an electrolyte solution to a predetermined area of a wafer. The steps that are used when making this application include applying the conductive material to the predetermined area of the wafer using an electrolyte solution disposed on a surface of the wafer, when the wafer is disposed between a cathode and an anode, and preventing accumulation of the conductive material to areas other than the predetermine area by mechanically polishing the other areas while the conductive material is being applied.
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