Microejector pump
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jan 30, 2001
Grant Date -
N/A
app pub date -
Jun 10, 1999
filing date -
Dec 11, 1996
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A microejector pump for generating microdrops includes at least one pump chamber configured in a silicon chip and a piezoelectrically actuable silicon membrane arranged over the pump chamber. The pump chamber is connected to at least one supply line as well as a discharge line provided with an ejection orifice. A glass chip closes off at least the pump chamber from the silicon membrane. The microejector pump can also include an integral heater and controller.
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