Monolithic scanning light emitting devices using micromachining
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United States of America Patent
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Jan 30, 2001
Grant Date -
N/A
app pub date -
Oct 15, 1998
filing date -
Dec 12, 1997
priority date (Note) -
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Abstract
A micro-machined movable light emitting assembly is formed on or from an undoped or pure III-V substrate or formed on or from a doped III-V substrate. The movable light emitting assemblies are to be actuated using force generators, to generate the various mechanical degrees of freedom depending on the type of stage suspension and actuation.
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