Semiconductor having low concentration of phosphorous

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United States of America Patent

PATENT NO 6180991
SERIAL NO

08426235

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Abstract

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A non-single-crystalline semiconductor material and a device utilizing the material, the material being of an intrinsic or substantially intrinsic conductivity type and including silicon and containing a dangling bond neutralizer consisting of hydrogen and/or a halogven wherein the concentration of carbon contained in the semiconductor material is less than 4.times.10.sup.18 and the concentration of boron contained in the semiconductor material is not higher than 2.times.10.sup.17 atoms/cm.sup.3.

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Patent Owner(s)

Patent OwnerAddress
SEMICONDUCTOR ENERGY LABORATORY CO LTDJAPAN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Yamazaki, Shunpei Tokyo, JP 7534 239327

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