Mechanical grating device with optical coating and method of making mechanical grating device with optical coating
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United States of America Patent
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Jan 30, 2001
Grant Date -
N/A
app pub date -
Dec 18, 1998
filing date -
Dec 18, 1998
priority date (Note) -
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Abstract
A mechanical grating device for enhancing the reflective properties is presented. A mechanical grating has a plurality of parallel ribbon elements which are suspended above a channel. An incident light beam is modulated by the actuation of selected ribbon elements. The actuation of the ribbon elements, which changes the height of the ribbon elements relative to the substrate, is a result of an applied voltage that produces an electrostatic force. On the top surface of the ribbon elements is a coating of reflective metal upon which is an optical coating is provided. The optical coating is a stack of at least two different materials with different refractive indices. The thickness and the composition of the sequential layers in the stack are chosen to produce certain desired reflective properties. Embodiments are presented for reducing the mechanical effects of the dielectric optical coating.
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