Method and system for imaging an object with a plurality of optical beams

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United States of America Patent

PATENT NO 6181472
SERIAL NO

09095367

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Abstract

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A diffracting beam splitter splits an optical beam. The resulting beams are swept over an object by a beam deflector. The beams are mechanically scanned transverse to the beam deflection direction. A position sensitive device receives light reflected from the incident beams and a three dimensional profile of the object is produced.

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Patent Owner(s)

Patent OwnerAddress
RUDOLPH TECHNOLOGIES INCONE RUDOLPH ROAD FLANDERS NJ 07836

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Liu, Kuo-Ching Setauket, NY 56 714

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