Ultraclean surface treatment device
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United States of America Patent
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Feb 6, 2001
Grant Date -
N/A
app pub date -
Nov 16, 1998
filing date -
Mar 27, 1998
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The present invention provides a novel porous polymeric device (101) (103) (105) (107) (109) (111) (113), e.g., an ultraclean brush. The device includes an elongated foam member (101, 103), which has an outer surface for removing residual particles from a surface of a substrate. Among other features, the elongated foam member includes a polyvinyl alcohol bearing compound, where the elongated foam member has a calcium ion impurity concentration of less than about 1 part per million. Accordingly, the present device is much cleaner than conventional devices.
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