Leak test method and apparatus

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United States of America Patent

PATENT NO 6182501
SERIAL NO

09172866

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Abstract

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In a leak test method and apparatus which introduces high-pressure gas into a work and a master from a high-pressure gas source through first and second electromagnetic valves, respectively, closes the first and second electromagnetic valves, detects the pressure difference between the work and the master by a differential pressure sensor, and compares the amount of leakage, obtained from the pressure difference, with a leakage reference value to thereby decides the work to be leak-free or leaky, a third electromagnetic valve is provided which permits and inhibits the passage of gas between the work and the master. Prior to measuring pressure difference variations in a measurement period and a stabilization period, the third electromagnetic valve is opened to establish a pressure equilibrium between the work and the master, then the electromagnetic valve is closed, then measures the pressure difference variations, and a last pressure difference variation .delta.p.sub.e is subtracted from an initial pressure difference variation .delta.p.sub.s to obtain the amount of drift.

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Patent Owner(s)

Patent OwnerAddress
COSMO INSTRUMENTS CO LTDTOKYO JAPAN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Furuse, Akio Hachioji, JP 14 202
Horikawa, Hiroshi Toyota, JP 69 1020
Nakagomi, Masayuki Higashiyamato, JP 1 41

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