Importance

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Abstract

An inkjet printhead and fabrication method include integrating actuators and ink firing chambers on a single substrate, such as a semiconductor substrate. The integration process utilizes semiconductor-on-insulator (SOI) techniques in the preferred embodiment. Actuators are formed on one surface of the substrate, typically a silicon substrate, and firing chambers are aligned with the actuators. Electrical switching devices, such as transistors, are formed along the surface and are utilized to individually address the actuators. After the integrated structure is formed, a supply manifold may be attached to the structure for replenishing fluid ink following a firing operation. Optionally, a flow control mechanism, such as a valve, may be incorporated between the manifold and the firing chamber.

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First Claim