Process for making high yield, DC stable proton exchanged waveguide for active integrated optic devices
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United States of America Patent
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Feb 6, 2001
Grant Date -
N/A
app pub date -
Sep 1, 1998
filing date -
Sep 1, 1998
priority date (Note) -
Expired
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Abstract
A process for greatly improving the DC drift problem associated with LiNbO.sub.3 and LiTaO.sub.3 substrates. The process immerses the substrates in a heat bath comprised of a strong acid and then subjects the substrates to cyclical annealing.
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