Heating apparatus for heating an object to be processed
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Feb 6, 2001
Grant Date -
N/A
app pub date -
Sep 9, 1999
filing date -
Sep 9, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An exhaust hole has a size covering not only a first region above a hot plate but also a second region surrounding the first region. A plate ember with a plurality of openings is disposed at the mouth of the exhaust hole. The exhaust hole exhausts air from the first region and the second region, even when the heat processing is not performed. Therefore, a solvent volatilized in the first region is also exhausted from the second region and will not leak outside the apparatus.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully