Bigrating light valve
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Feb 13, 2001
Grant Date -
N/A
app pub date -
Jan 3, 2000
filing date -
Jan 5, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A spatial light modulator pixel comprises a movable reflective surface in which an array of subapertures is formed, wherein each subaperture contains a fixed (non-movable) island reflector. The movable reflector is micromechanically actuated so that the combination of movable and fixed reflectors functions alternately as a plane mirror or as a two-dimensional diffraction grating (i.e., a 'bigrating'), depending on the movable reflector's position. The device is useful for applications such as maskless lithography and high-resolution printing.
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