Substrate processing device
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Feb 20, 2001
Grant Date -
N/A
app pub date -
May 24, 1999
filing date -
Nov 22, 1996
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An apparatus for processing substrates is provided. The apparatus includes a receptacle for containing processing fluid, and at least one substrate support. Components of the receptacle and/or substrate support that come into contact with processing fluid have a protective layer. Guide or support members for the substrates are fused to the protective layer.
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Cited Art Landscape
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