Heating element with a diamond sealing material
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United States of America Patent
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-
Feb 20, 2001
Issued Date -
N/A
app pub date -
May 14, 1999
filing date -
Feb 28, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A substrate support plate including a heating element for use in a process chamber is described. The heating element includes an outer sheath, a heating filament and a thermally-conductive and electrically insulative sealing material. The sealing material comprises a diamond powder.
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