Importance

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Abstract

A capacitance sensor detects the absence/presence of physical matter on a sensing surface of the sensor. The capacitive sensor is a multi-cell sensor wherein each cell has one or more buried, protected, and physically inaccessible capacitor plates. The sensor is physically placed in an environment that is to be monitored for deposition of a particle, vapor, and/or drop of a foreign material on the sensing surface. All cells are initially placed in a startup condition or state. Thereafter, the cells are interrogated or readout, looking for a change in the equivalent feedback capacitance that results from an electrical field shape modification that is caused by the presence of physical matter on the sensing surface. When no such change is detected, the method is repeated for another cell. When a change is detected for a cell, a particle/vapor/drop output is provided. As an optional step, the sensor is provided with a layer of a material that is selectively reactive to or reactive with, a particle/vapor/drop of a known type of foreign material.

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First Claim