Method for detecting a contact position between an object to be measured and measuring pins
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Feb 20, 2001
Grant Date -
N/A
app pub date -
May 22, 1998
filing date -
May 28, 1997
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A method is disclosed for detecting a contact position between an object under measurement and measuring pins. A semiconductor test device issues an instruction to a wafer prober control unit to control raising and down of a stage. When raising the stage in units of a predetermined distance a and detecting that the number of probe pins in contact with a wafer is equal to or greater than a constant value; the semiconductor test device lowers the stage in units of the predetermined distance a. When the number of contacted pins are less than the constant value, the device again raises the stage in units of a predetermined distance b smaller than the predetermined distance a; whereas, when the number of contacted pins is equal to or greater than the constant value, the device treats the position of the stage at that time as a first touch position.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully