Contactless method for measuring total charge of an insulating layer on a substrate using corona charge
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United States of America Patent
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Feb 20, 2001
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N/A
app pub date -
Aug 18, 1997
filing date -
Aug 18, 1997
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Abstract
A method of measuring total charge of an insulating layer on a semiconductor substrate includes applying corona charges to the insulating layer and measuring a surface photovoltage of the insulating layer after applying each of the corona charges. The charge density of each of the corona charges is measured with a coulombmeter. A total corona charge required to obtain a surface photovoltage of a predetermined fixed value is determined and used to calculate the total charge of the insulating layer. The fixed value corresponds to either a flatband or midband condition.
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