Importance

Loading Importance Indicators...

Abstract

A wafer processing method is provided for processing a plurality of wafer lots concurrently in a plurality of different tanks. Each wafer lot is assigned a specific start number, position number, tank number and wafer number. Upon a wafer completing a process in a tank, a finish signal is generated, and a next wafer lot information for a wafer lot that needs the completed tank for processing is loaded into a memory. Once the tank is free and available, the next wafer from a wafer lot is moved in while all other tanks are being processed independently and concurrently. The wafer lots do not need to queue in sequence for other wafer lots to complete processing in different tanks. Total processing time can therefore be reduced and through-put increased.

Loading the Abstract Image...

First Claim