Device for producing plasma
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United States of America Patent
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Feb 27, 2001
Grant Date -
N/A
app pub date -
Jan 6, 2000
filing date -
May 28, 1997
priority date (Note) -
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Abstract
A device for producing plasma includes an isolating pipe formed of an isolating material, a rod-shaped conductor positioned inside of the pipe, the rod-shaped conductor having an inner diameter that is smaller than the diameter of the of the isolating pipe, and an inner alternating electromagnetic field source connected to a first end of the conductor. The device also includes a conductive pipe positioned inside of the isolating pipe and concentrically around the conductor, the conductive pipe being formed so as to partially enclose the conductor, and an outer alternating electromagnetic field source connected to a first end of the conductive pipe.
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