Importance

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Abstract

A piezoelectric gas sensing device, comprising: (a) a piezoelectric element arranged for gas sensing exposure to a gas environment; (b) a layer of a gas-retentive support material on the piezoelectric element which is retentively effective for a gas component potentially present in the gas environment; and (c) a gas-interactive material associated with the retentive support material, and sorptively effective to form a solid interaction product in interaction with the gas component potentially present in the gas environment, with the solid interaction product imparting a changed frequency response to the piezoelectric gas sensing device, in relation to a corresponding piezoelectric gas sensing device in the absence of the solid interaction product resulting from presence of the gas component in the gas environment. The device can be utilized to detect the presence and/or concentration of a gas species such as a hydride, hydrocarbon, silane, etc. in the fluid being monitored by the device.

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First Claim