Method of making small gaps for small electrical/mechanical devices
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Mar 6, 2001
Grant Date -
N/A
app pub date -
Jan 14, 2000
filing date -
Jan 14, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A method and system for making small gaps in a MEMS device is disclosed. The MEMS device is first made with a sacrificial layer where the gap is to reside. The device can then be assembled, including forming a protective coat surrounding the device. Once the protective coat is formed, small holes in the protective coat can be made to expose the sacrificial layer to an external environment. The holes can be formed using laser ablation. After the small holes have been made, an etchant can then be applied through the holes to remove the sacrificial layer.
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