Non-contact electrical conduction measurement for insulating films
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United States of America Patent
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Mar 13, 2001
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N/A
app pub date -
Jun 20, 2000
filing date -
Apr 23, 1997
priority date (Note) -
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Abstract
A corona source is used to apply charge to an insulating layer. The resulting voltage over time is used to determine the current through the layer. The resulting data determines a current-voltage characteristic for the layer and may be used to determine the tunneling field for the layer.
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