Importance

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Abstract

An apparatus for testing of electrical, mechanical, physical and/or chemical properties of material in sheet form includes sensors which may be positioned adjacent to a surface of material in sheet form located in a cassette and supports positioned to reduce sag of the material. A method for testing sheet material includes the steps of placing the sheet material in a cassette, and testing the sheet material while in the cassette. A cassette includes shelves having defined therein test heads for testing properties of material in sheet form. Shelves may have test heads or sensors mounted in a lower surface thereof, which test heads or sensors cooperate with test heads or sensors mounted in the upper surface of the next lower shelf. Shelves may include test points that have multiple sensors that cooperate, such as by inductive coupling, to test the material. A robot end effector is dimensioned to contact a lower surface of material in a cassette and has test sensors defined therein for testing of properties of the material. Materials to be tested include flat panels for computer screens and semiconductor wafers.

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First Claim