Importance

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Abstract

A capacitive pressure transducer includes a conductive diaphragm positioned between pneumatically separated chambers defined by concave body members. The diaphragm is fixed and sealingly coupled at its periphery to the peripheral rim of the concave body members. The diaphragm can be supported in tension by the peripheral rim of the body members. An electrode assembly, supported by one body member, establishes a substantially planar conductive surface opposite to and spaced apart by a nominal gap from the conductive diaphragm. The capacitive pressure transducer further includes a thermal compensation element securely coupled to the inside surface or the outside surface of one of the concave body members and/or to the electrode. The thermal compensation element has a different coefficient of thermal expansion from that of the concave body member or electrode to which it is attached. The combination of the concave body member or electrode and thermal compensation element having different coefficients of thermal expansion results in a bimetallic action which produces a thermally dependent force that compensates or counter-acts the thermally induced changes in the characteristics of the transducer.

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First Claim