Electrostatic-erasing abrasion-proof coating and method for forming the same

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United States of America Patent

PATENT NO 6207281
SERIAL NO

08016240

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Abstract

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An abrasion-proof and static-erasing coating is formed on the contact surface of a contact image sensor. The coating comprises a first film having a high hardness and a low conductivity, a second film formed on the first film and having a low hardness and a high conductivity, and a third film having a high hardness and a high resistivity providing an abrasion-proof insulating external surface.

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Patent Owner(s)

  • SEMICONDUCTOR ENERGY LABORATORY CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Itoh, Kenji Kanagawa, JP 148 2408

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