Method for manufacturing a pressure-measuring device equipped with a resonating element
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United States of America Patent
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Mar 27, 2001
Grant Date -
N/A
app pub date -
Nov 6, 1998
filing date -
Sep 18, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Method for manufacturing a pressure-measuring device comprising a diaphragm of semiconductor material having a resonating element fixed thereto, said diaphragm being exposed to the pressure of a process fluid, wherein it comprises the following phases: i) machining a multilayer semiconductor material to obtain a diaphragm having on the upper side a resonating element, an excitation element and a detection element for measuring the pressure applied to said diaphragm; ii) machining a semiconductor material having one or more layers to obtain a support having a pressure port for the flow of the process fluid; iii) making a bond between the lower side of said diaphragm and the upper side of said support.
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