Cluster tool
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United States of America Patent
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Mar 27, 2001
Grant Date -
N/A
app pub date -
Mar 24, 1998
filing date -
Mar 24, 1998
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A cluster tool for testing substrates and locating defects on the substrates utilizing a plurality of tools coupled via an automation platform. The cluster tool includes an interface receiving storage device(s) having, each, more than one substrate contained therein. An inspection tool capable of inspecting the substrates and delivering defect map indicative of suspected locations on each of the substrates. The automation platform is coupled to the interface to the inspection tool, and to a review tool, and is capable of transferring substrates between the tools.
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