Pressure sensor membrane having stepped annular peripheral surfaces and pressure sensor employing same
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United States of America Patent
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Apr 3, 2001
Grant Date -
N/A
app pub date -
Dec 15, 1997
filing date -
Dec 18, 1996
priority date (Note) -
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status (Latency Note)
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Abstract
The invention concerns a membrane for a pressure sensor. The membrane has, on a flat central face (26), an annular attachment face (12), which is disposed concentric to the central face (26), and a non-flat connecting face (54), which links the central face (26) with the edge face (12). The connecting face (54) is formed from at least one annular step (36, 44, 52), which consists of one flat annular face (32, 40, 48) and one truncated-cone-shaped step face (30, 38, 46), which connects radially inward to the annular face. The annular faces (32, 40, 48) and the central face (26) lie in planes parallel to each other, whereby the heights (h1, h2, h3) of the step faces (30, 38, 46) measured perpendicular to the plane of the central face are very small in relationship to the width of the respective step. This stepped design of the membrane results in a high linearity of the characteristic of the membrane pressure sensor and at the same time to a steep slope of the characteristic in its linear region.
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