Semi-insulated indium phosphide based compositions

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United States of America Patent

PATENT NO 6211539
SERIAL NO

08199910

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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It has been found that through the use of ferrocene or iron pentacarbonyl based compounds, it is possible to produce semi-insulating epitaxial layers of indium phosphide-based compounds by an MOCVD process. Resistivities up to 1.times.10.sup.9 ohm-cm have been achieved as compared to resistivities on the order of 5.times.10.sup.3 ohm-cm for other types of semi-insulating epitaxial indium phosphide.

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Patent Owner(s)

  • AT&T IPM CORP.;BELL SEMICONDUCTOR, LLC;LUCENT TECHNOLOGIES INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Johnston, Jr Wilbur Dexter Mendham, NJ 5 26
Long, Judith Ann Millburn, NJ 1 2

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