Nozzle-injector for arc plasma deposition apparatus
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United States of America Patent
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Apr 10, 2001
Grant Date -
N/A
app pub date -
Mar 3, 1998
filing date -
Jun 26, 1997
priority date (Note) -
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Abstract
A nozzle-injector was designed and fabricated for plasma deposition of thin-film coatings using a wall-stabilized arc torch as the plasma generator. The design of the nozzle-injector controls the injection, ionization, and reaction of the reagents, and these functions, in turn, determine the coating deposition rate, coating area, coating composition, and coating quality.
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