Pad conditioner cleaning apparatus

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6217430
SERIAL NO

09184786

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A cleaning cup for holding and cleaning a pad conditioner having a conditioner head, the cleaning cup includes a spray nozzle for spraying a cleaning solution on a top side of the conditioner head. The cleaning cup further includes a plurality of support pins extending upwards from a base of the cleaning cup to receive the conditioner head thereon.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054-3299

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brown, Brian J Palo Alto, CA 204 5717
Fishkin, Boris San Carlos, CA 46 1181
Hoey, Gee San Jose, CA 4 48
Koga, Raijiro Tsuchiura, JP 3 47
Kumagai, Takashi Yokohama, JP 149 2091
Redeker, Fred C Fremont, CA 195 5499
Tsuruta, Hiromi Chiba, JP 3 32

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