Electroplating bath with megasonic transducer
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United States of America Patent
Stats
-
Apr 17, 2001
Grant Date -
N/A
app pub date -
May 19, 1999
filing date -
May 19, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A megasonic plating technique employs a megasonic transducer to create a ridge of electrolyte that extends upward above a plating tray. A chuck holds the substrate to be plated so the face of the wafer is oriented downwards. The megasonic transducer extends along a base of the center part of the tray, and an elongated anode element is positioned above the transducer. Spargers introduce electrolyte into the tray non-turbulently along opposite sides of the transducer. There is a transverse relative motion created between the tray and the chuck so that the ridge of electrolyte sweeps across the face of the substrate.
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Cited Art Landscape
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