Semiconductor composition material conveyer module
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United States of America Patent
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Apr 24, 2001
Grant Date -
N/A
app pub date -
Mar 30, 1999
filing date -
Mar 30, 1999
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A semiconductor composition material conveyer module, which includes at least one horizontal conveyer unit and at least one vertical conveyer unit arranged with the at least one horizontal conveyer unit to form an automatic production line for conveying semiconductor composition material for processing. A displacement sensor is triggered when semiconductor composition material is delivered from the horizontal conveyer unit at one production line to the matched vertical conveyer unit, thereby causing the matched vertical conveyer unit to carry semiconductor composition material to a horizontal conveyer unit at a second production line for further processing.
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